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PCS-RF-AO
Operation
Working Principle

Radio Frequency assisted plasma source

Max. Power

500 W max. at 13.56 MHz

Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)

Operating Modes

Atom mode

Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories

  • Integrated shutter
  • Non standard lengths
  • Various aperture types
  • Differential pumping
  • Autotuning unit
  • Viewport
  • Plasma monitor
  • Plasma controller
  • Faraday cup: Provides the possibility to
  • Mounting
    Mounting Flange

    NW63CF (4.5 ")

    Insertion Depth

    300 mm

    Performance
    Spot Size

    ~23 mm at source

    Product details
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