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PCS-RF-AO
Operation
Working Principle

Radio Frequency assisted plasma source

Max. Power

500 W max. at 13.56 MHz

(400W for oxygen and hydrogen)

Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)

Operating Modes

Atom mode

Operating Pressure

< 10-7 - 10-5 mbar

Optional Accessories

Integrated shutter

Non standard lengths

Various aperture types

Differential pumping

Autotuning unit

Viewport

Plasma monitor

Plasma Control

Ion Trap

Mounting
Mounting Flange

NW63CF (4.5 ")

Insertion Depth

309 mm

Performance
Spot Size

~23 mm at source

Product details
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