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E-beam power

60 W max. at 2.45 GHz

Working Principle

Microwave assisted plasma source

Operating Modes

Hybrid mode

Gas Flow Rate

< 0.1 sccm to 100 sccm (mode dependant)

Optional Accessories
  • Integrated shutter
  • Various aperture types
  • Differential pumping
  • Ion trap: Deflects residual ion current out of the beam<
  • Faraday cup: Provides the possibility to monitor the beam current
Operating Pressure

< 10-7 - 10-5 mbar

Insertion Depth

130 mm

Mounting Flange

NW40CF (2.75 ")

Spot Size

~13 mm at source

Product details
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