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IQE 12 LE
Operation
Ion Current

>0.8 μA (Argon) at 125 μm spot

Ion Energy

10 eV - 5 keV

Operating Gases

Various

Scannable

yes

Working Principle

Extractor type

Applications

  • Depth profiling
  • Sample cleaning
  • Implantation
  • ISS

Required Accessories

Gas inlet

Optional Accessories

  • Wien mass filter
  • Piezo gas inlet system
  • Differential pumping system
  • Remote operation for depth profiling

Performance
Scan Range

10 x 10 mm2 at 23 mm working distance

Spot Size

125 μm at 23 mm working distance

Mounting
Insertion Depth

186 mm

Mounting Flange

DN38CF (2.75 ")

Power Supply

  • PU-IQE12/38
  • PU-IQE 12/38 LE

Product details
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