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IQE 11/35
Operation
Ion Current

up to 20 μA (Argon)

Ion Energy

200 eV - 5 keV

Operating Gases

Various

Scannable

-

Working Principle

Extractor type

Applications

  • Sample cleaning
  • Implantation

Required Accessories

Gas inlet

Optional Accessories

-

Performance
Scan Range

-

Spot Size

< 5 mm at 30 mm working distance

Mounting
Insertion Depth

62.5 mm, 120 mm, 190 mm, 250 mm

Mounting Flange

DN35CF (2.75 ")

Power Supply

COSCON IS

Product details
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