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FDG 150

- None -

FDG 15

IQE 11/35

IQE 12/38 LE

IQE 12/38

IQP 10/63

- None -

FDG 15

IQE 11/35

IQE 12/38 LE

IQE 12/38

IQP 10/63

- None -

FDG 15

IQE 11/35

IQE 12/38 LE

IQE 12/38

IQP 10/63

Operation

Ion Current	>15 µA (at 5 keV and 50 mm WD) >1 µA (at 50 eV)
Ion Energy	10 eV - 5 keV
Operating Gases	Argon and other noble gases, Hydrogen and Oxygen
Scannable	yes
Working Principle	Extractor type with floating column
Applications	Depth profiling Charge compensation Wide energy range sputter cleaning of semiconductors and metals
Required Accessories	Gas inlet
Optional Accessories	Differential pumping

Performance

Scan Range	up 10 mm x 10 mm (at 5 keV and 50 mm WD)
Spot Size	<150 µm (at 5 keV and 50 mm WD)

Mounting

Insertion Depth	224 mm
Mounting Flange	DN 40 CF

Product details

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