Energy Dispersion |
Hemisphere |
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Slits/Apertures |
8 Entrance, 3 Exit slits and Iris aperture |
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Magnetic Shielding |
Double µ-Metal Shielding |
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Lens Modes |
Angular Resolving, Transmission and Magnification (Lateral Resolution) Lens Modes |
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Kinetic Energy Range |
0 - 3500 eV |
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Pass Energies |
0 - 550 eV continously adjustable |
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Detector |
2D-CCD/CMOS Detector |
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Measurement Modes |
Snapshot mode, Sweeping mode, Fixed energy mode |
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Energy Window |
13% of Pass Energy |
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Electric Isolation |
up to 7 keV |
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Electronics |
HSA 3500 plus HT 101 for analyzer and HSA 3500 plus HT 173 for pre-lens |
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Working Pressure |
up to 30 mbar (higher pressure values achievable with corresponding nozzle diameters and differential pumping packages) |
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Acceptance Angle |
±22° |
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Angular Resolution |
< 0.7° |
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Energy Resolution |
< 10 meV |
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Lateral Resolution |
<15 μm (guaranteed), <10 μm (achievable) with imaging lens module |
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Smallest Acceptance Spot |
Without imaging lens module the smallest acceptance spot is defined by the excitation spot of X-ray source or nozzle diameter |
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Detector Channels |
1900 x 1200 (with channel binning) |
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XPS Count Rates UHV |
70 kcps (guaranteed), 150 kcps (achievable) * |
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XPS Count Rates 10 mbar |
7 kcps (guaranteed), 15 kcps (achievable) * |
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XPS Count Rates 25 mbar |
0.5 kcps (guaranteed), 1.5 kcps (achievable) * |
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* Ag 3d, FWHM < 0.85 eV, small spot monochromated X-ray source µ-FOCUS 600, Al Kα anode, 20 W, Spot size < 250 µm |
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Mounting Flange |
DN150 CF (8" OD) |
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Working Distance |
300 - 500 µm (for standard nozzle with 300 µm diameter) |
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