Logo specsDetail

µ-FOCUS 500/600

High Performance Small-Spot Monochromatic X-Ray Source

The small spot monochromator µ-FOCUS 500/600 operates according to Bragg´s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. The mirror has a 500 mm Rowland circle diameter for µ-FOCUS 500  and 600 mm for µ-FOCUS 600, respectively. Due to its overall compactness, the µ-FOCUS 500/600 is suitable for mounting on almost any analysis chambers as a bolt-on component. The port length for µ-FOCUS 500 is 177 mm, while for µ-FOCUS 600 model is 254 mm. A moveable aluminized polymer window (shutter) is provided on the monochromator housing for differential pumping or to shield the crystal assembly during sputtering.

The µ-FOCUS 500/600 monchromator is equipped with microfocus high performance X-ray source XR 50 MF which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode. The µ-FOCUS 500/600 monochromator togeher with the XR 50 MF microfocus X-ray source is perfectly suited for small spot, high resolution and high intensity XPS measurements.


  • Spot size on the sample: between 200 µm and 1 mm
  • Monochromatic Al Kα excitation with high energy resolution for most demanding XPS measurements
  • High photon flux up to 2 x 1010 photons/s
  • Rowland circle with 500/600 mm
  • Pumping port for differential pumping




µ-FOCUS 500/600

180 W for Al anode

Maximum Anode Voltage

15 kV

Dual Anode


Working Conditions


Required Accessories

CCX 70 Isolation Unit

Closed-Cycle Water Cooling System

Optional Accessories

Differential Pumping



Anode Materials Available

Al anode

Power Supply

UXC 1000 Universal X-Ray Source Control

Mounting Flange

DN100 CF

Insertion Depth


max. chamber port length for µ-FOCUS 500: 177 mm

max. chamber port length for µ-FOCUS 600: 254 mm

Rowland Cirlce Diameter

500 mm for µ-FOCUS 500

600 mm for µ-FOCUS 600

Cross Talk


Spot Size

variable spot size: 200 µm - 1 mm

Photon Flux

2 x 1010 photons/s





  1. (2019) <p>New Insight into the Gas-Sensing Properties of CuOx Nanowires by Near-Ambient Pressure XPS</p>

    This article presents an investigation of the sensing properties of chemiresistors based on Cu2O/CuO core–shell nanowires containing p–p′ heterojunctions. The nanowires were synthesized by a conventional hydrothermal method and used for the detection of ethanol and nitrogen dioxide, reducing and oxidizing agents, respectively. To unravel the chemical processes connected with gas detection, an in situ approach was applied. This approach was based on near-ambient pressure X-ray photoelectron spectroscopy combined with simultaneous monitoring of sensor responses. The in situ measurements were performed during exposure to the analytes at a total pressure of 0.05–1.05 mbar and 450 K and were correlated with chemiresistor response measurements carried out at a standard pressure and under an ambient atmosphere. The study revealed that heterojunction treatment with ethanol vapors, accompanied by partial reduction of the nanowires, is the key step to obtaining chemiresistors with good sensing performance. While the untreated heterojunctions exhibited poor n-type sensing responses, the treated ones showed significantly improved p-type responses. The treated sensors were characterized by a stable baseline, high reversibility, detection limits estimated as 50 ppm for ethanol and 100 ppb for nitrogen dioxide, and with response times in tens of seconds. In all cases, we propose a band scheme of Cu2O/CuO heterojunctions and a gas-sensing mechanism.

    P. Hozák, M. Vorokhta, I. Khalakhan, K. Jarkovská, K. Jarkovská
    J. Cibulková, P. Fitl, J. Vlček, J. Fara, D. Tomeček, M. Novotný, M. Vorokhta, J. Lančok, I. Matolínová, and M. Vrňata
    J. Phys. Chem. C 2019, 123, 49, 29739–29749
    Read more
  2. (2019) Surface Plasmon Enabling Nitrogen Fixation in Pure Water through a Dissociative Mechanism under Mild Conditions

    Nitrogen fixation in a simulated natural environment (i.e., near ambient pressure, room temperature, pure water and incident light) would provide a desirable approach to future nitrogen conversion. As N≡N triple bond has a thermodynamically high cleavage energy, nitrogen reduction under such mild conditions typically undergoes associative alternating or distal pathways rather than follows a dissociative mechanism. Here we report that surface plasmon can supply sufficient energy to activate N2 through a dissociative mechanism in the presence of water and incident light, as evidenced by in-situ synchrotron radiation-based infrared spectroscopy and near ambient pressure X-ray photoelectron spectroscopy. Theoretical simulation indicates that the electric field enhanced by surface plasmon, together with plasmonic hot electrons and interfacial hybridization, may play a critical role in N≡N dissociation. Specifically, AuRu core-antenna nanostructures with broaden light adsorption cross section and active sites achieve an ammonia production rate of 101.4 μmol·g-1·h-1 without any sacrificial agent at room temperature and 2-atm pressure. This work highlights the significance of
    surface plasmon to activation of inert molecules, serving as a promising platform for developing novel catalytic systems.

    C. Hu, X. Chen, J. Jin, Y. Han, S. Chen, H. Ju, J. Cai, Y. Qiu, C. Gao, C. Wang, Z. Qi, R. Long, L. Song, Z. Liu, Y. Xiong
    J. Am. Chem. Soc., Just Accepted Manuscript • Publication Date (Web): 30 Apr 2019
    Read more
  3. (2018) <p>Investigation of gas sensing mechanism of SnO2 based chemiresistor using near ambient pressure XPS</p>

    In this article, we present the results of an investigation into chemical processes which take place at the surface of SnO2-based chemiresistor in various atmospheres (1 mbar of argon, 1 mbar of oxygen, 0.1 mbar of ethanol, 1 mbar of oxygen + 0.1 mbar of ethanol mixture) at common working temperatures (450 and 573 K). The key method for nanoscale analysis was the Near Ambient Pressure X-ray Photoelectron Spectroscopy. In parallel the resistance and DC-responses of SnO2 layer were in-situ monitored providing information about macroscale processes during gas sensing. The change in the sensor resistance after exposure to the ethanol-containing atmospheres together with the disappearance of the band bending effect and observation of different carbonaceous groups including ethoxy groups and acetaldehyde molecules on the sensor surface in the XPS spectra supported the theory of chemical interaction of ethanol with the chemisorbed oxygen. The NAP-XPS spectra also showed that the nanostructured tin oxide is partially reduced even after being exposed to pure oxygen at 573 K. Exposing this surface to the mixture of O2/EtOH did not significantly increase the surface reduction probably due to slow kinetics of the ethanol reduction process and fast kinetics of the oxygen re-oxidation process. However, it was demonstrated that the surface of sensor is slowly getting contaminated by carbon.

    M. Vorokhta, I. Khalakhan, M. Vondráček, D. Tomeček, M. Vorokhta, E. Marešová, J. Nováková, J. Vlček, P. Fitl, M. Novotný, P. Hozák, J. Lančok, M. Vrňata, I. Matolínová, and V. Matolín
    Surface Science, Volume 677, November 2018, Pages 284-290
    Read more


Product image
Product description
Article No.
Emitter for µ-Focus 500

Exchange Emitter unit for XR-MF source

Set of Al-Anode for XR-MF including water divider

Exchange anode for XR-MF source



Your web browser is deprecated
This could effect the presentation and some functions of our website.