µ-FOCUS 500/600 High Performance Small-Spot X-Ray Monochromator for X-Ray source
The µ-FOCUS 500/600 X-ray monochromator for UHV enables high resolution XPS measurements in the laboratory off the synchrotron. The high performance monochromator is available with Rowland circle diameter of 500 mm for µ-FOCUS 500 and 600 mm for µ-FOCUS 600, used in larger chambers. As well due to its overall compactness it also matches customer chambers as a bolt-on component. Al anode X-ray source is used in combination with this monochromator. The achieveble spot size varies between 250 μm (20 W max.) and larger than 1 mm (180 W max.), which is unique to only to SPECS small spot monochromators.
Exchange Emitter unit for XR-MF source
Exchange anode for XR-MF source