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µ-FOCUS 500/600

High Performance Small-Spot Monochromatic X-Ray Source

The small spot monochromator µ-FOCUS 500/600 operates according to Bragg´s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. The mirror has a 500 mm Rowland circle diameter for µ-FOCUS 500  and 600 mm for µ-FOCUS 600, respectively. Due to its overall compactness, the µ-FOCUS 500/600 is suitable for mounting on almost any analysis chambers as a bolt-on component. The port length for µ-FOCUS 500 is 177 mm, while for µ-FOCUS 600 model is 254 mm. A moveable aluminized polymer window (shutter) is provided on the monochromator housing for differential pumping or to shield the crystal assembly during sputtering.

The µ-FOCUS 500/600 monchromator is equipped with microfocus high performance X-ray source XR 50 MF which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode. The µ-FOCUS 500/600 monochromator togeher with the XR 50 MF microfocus X-ray source is perfectly suited for small spot, high resolution and high intensity XPS measurements.


  • Spot size on the sample: between 200 µm and 1 mm
  • Monochromatic Al Kα excitation with high energy resolution for most demanding XPS measurements
  • High photon flux up to 2 x 1010 photons/s
  • Rowland circle with 500/600 mm
  • Pumping port for differential pumping




µ-FOCUS 500/600

180 W for Al anode

Maximum Anode Voltage

15 kV

Dual Anode


Working Conditions


Required Accessories

CCX 70 Isolation Unit

Closed-Cycle Water Cooling System

Optional Accessories

Differential Pumping



Anode Materials Available

Al anode

Power Supply

UXC 1000 Universal X-Ray Source Control

Mounting Flange

DN100 CF

Insertion Depth


max. chamber port length for µ-FOCUS 500: 177 mm

max. chamber port length for µ-FOCUS 600: 254 mm

Rowland Cirlce Diameter

500 mm for µ-FOCUS 500

600 mm for µ-FOCUS 600

Cross Talk


Spot Size

variable spot size: 200 µm - 1 mm

Photon Flux

2 x 1010 photons/s



  1. (2019) Surface Plasmon Enabling Nitrogen Fixation in Pure Water through a Dissociative Mechanism under Mild Conditions

    Nitrogen fixation in a simulated natural environment (i.e., near ambient pressure, room temperature, pure water and incident light) would provide a desirable approach to future nitrogen conversion. As N≡N triple bond has a thermodynamically high cleavage energy, nitrogen reduction under such mild conditions typically undergoes associative alternating or distal pathways rather than follows a dissociative mechanism. Here we report that surface plasmon can supply sufficient energy to activate N2 through a dissociative mechanism in the presence of water and incident light, as evidenced by in-situ synchrotron radiation-based infrared spectroscopy and near ambient pressure X-ray photoelectron spectroscopy. Theoretical simulation indicates that the electric field enhanced by surface plasmon, together with plasmonic hot electrons and interfacial hybridization, may play a critical role in N≡N dissociation. Specifically, AuRu core-antenna nanostructures with broaden light adsorption cross section and active sites achieve an ammonia production rate of 101.4 μmol·g-1·h-1 without any sacrificial agent at room temperature and 2-atm pressure. This work highlights the significance of
    surface plasmon to activation of inert molecules, serving as a promising platform for developing novel catalytic systems.

    C. Hu, X. Chen, J. Jin, Y. Han, S. Chen, H. Ju, J. Cai, Y. Qiu, C. Gao, C. Wang, Z. Qi, R. Long, L. Song, Z. Liu, Y. Xiong
    J. Am. Chem. Soc., Just Accepted Manuscript • Publication Date (Web): 30 Apr 2019
    Read more


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Product description
Article No.
Emitter for µ-Focus 500

Exchange Emitter unit for XR-MF source

Set of Al-Anode for XR-MF including water divider

Exchange anode for XR-MF source