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µ-FOCUS 500/600 NAP

Small Spot µ-FOCUS 500/600 X-Ray Monochromator for Near Ambient Pressure Applications

The small spot monochromator µ-FOCUS 500/600 NAP is developed for XPS measurements in near ambient pressure regime. The X-ray monochromator operates according to Bragg´s Law of X-ray diffraction. A single wavelength of X-rays is reflected from a quartz single crystal mirror at a specific angle of reflection. The mirror has a 500 mm Rowland circle diameter for µ-FOCUS 500  NAP and 600 mm for µ-FOCUS 600 NAP, respectively. Due to its overall compactness, the µ-FOCUS 500/600 NAP is suitable for mounting on almost any analysis chambers as a bolt-on component. By using the differentially pumped NAP extension with Si3N4 window, XPS measurements under gas atmospheres of up to 30 mbar can be carried out.

The µ-FOCUS 500/600 NAP monchromator is equipped with microfocus high performance X-ray source XR 50 MF which is specially designed for the use with the monochromator. This small spot source is equipped with Al anode. Thus, µ-FOCUS 500/600 NAP monochromator togeher with the XR 50 MF microfocus X-ray source is perfectly suited for small spot, high resolution and high intensity XPS measurements under NAP conditions.

KEY FEATURES

  • Spot size on the sample: between 200 µm and 1 mm
  • NAP extension with Si3N4 window for XPS measurements under gas atmospheres up to 30 mbar
  • Monochromatic Al Kα excitation with high energy resolution
  • High photon flux up to 1.9 x 1010 photons/s
  • Rowland circle with 500/600 mm
  • Pumping port for differential pumping

MADE FOR THESE METHODS

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SPECIFICATIONS

µ-FOCUS 500/600 NAP
Operation
Power

180 W for Al anode

Maximum Anode Voltage

15 kV

Dual Anode

n.a.

Working Conditions

UHV and NAP

Required Accessories

CCX 70 Isolation Unit

Differential pumping

Closed-Cycle Water Cooling System

Optional Accessories

n.a.

Monochromated

Yes

Mounting
Anode Materials Available

Al anode

Power Supply

UXC 1000 Universal X-Ray Source Control

Mounting Flange

DN100 CF

Insertion Depth

n.a.

max. chamber port length for µ-FOCUS 500: 177 mm

max. chamber port length for µ-FOCUS 600: 254 mm

Rowland Cirlce Diameter

500 mm for µ-FOCUS 500 NAP

600 mm for µ-FOCUS 600 NAP

Performance
Cross Talk

n.a.

Spot Size

variable spot size: 200 µm - 1 mm

Photon Flux

1.9 x 1010 photons/s

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