PU-IQE 12/38

Digital Power Unit for IQE 12/38 Ion Source. Remotely Controllable with Storage Option of up to 9 Parameter Sets

PU-IQE 12/38 is a digital power unit for IQE 12/38 Ion Source. It is remotely controllable via IEC 488 and RS 232 interfaces, has a timer for stand alone operation and a storage capacity of up to 9 different parameter sets for different gases or experimental conditions. Extremely reliable emission current is achieved by a fully digitized regulation. It provides key stone correction of the scan area to generate flat crater bottoms on tilted samples as well as gating for depth profiling. The scan area remains constant over the whole ion energy range. Optionally, it can be provided with x-y analog input for operation with external scan generator.

KEY FEATURES

  • Remote operation  via IEC 488 and RS232 interfaces
  • One housing for power supply and deflection unit
  • Storage of up to 9 different parameter sets
  • Key stone correction of scan area for tilted samples
  • Gating for depth profiling
  • x-y analog monitor voltage outputs (0-10V) for mapping
  • Optional x-y analog input for operation with external scan generator  
  • Timer for stand alone operation 
  • Fully digitized emission current regulation
  • Automatic self test during initialization 
  • Check of filament function during operation 
  • Constant scanned area over the whole ion energy range
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Product description
Article No.
 
SHV-Jumper Cable

Bridge cable for PU IQE 12/38, PU IQE 11/35

2060009307
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