Logo specsDetail

Gas Inlet System for UV sources (UVS 10/35, UVS 300, UVLS)

High Precision Gas Inlet System for UV Sources.

Manual dosing valve for inert gases for the operation of UV sources. A piezzo driven gas inlet system is optionally available.

KEY FEATURES

  • Stable Gas Dosing
  • Full Metal Valve
Back to top

MADE FOR THESE METHODS

1
ARPES, UPS
Angle-Resolved Photoelectron Spectroscopy detects the energy and angle distribution of photoelectrons to determine the electronic structure of solids.
Back to top

SPARE PARTS

3
Product image
Product description
Article No.
 
Membrane for VAT leak valve

Replacement membrane for VAT leak valve

2100010186
piezo actor

Replacement Piezo actor for SPECS Piezo Gas Inlet system

2060005909
variable leak valve DN16CF-R

New VAT leak valve

2060015126
Close