DetailEBE-4
Multi-Pocket Electron Beam Evaporator for Deposition of Thin Metal Films with Highest Purity for Various Surface Science Applications.
The SPECS EBE-4 is a combined multipocket mini e-beam evaporator which is capable of evaporating small quantities of almost any material. The material (either from crucible or rod form) is heated by eletron bombardment from a surrounding filament thereby allowing temperatures in excess of 3000 K to be reached.
Up to 4 pockets can be fitted with a fixed-length holder or a linear drive which allows a rod feed of up to 25 mm or can be upgraded by the user later on. All pockets may be used individually or in any combination for true coevaporation. The instrument is therefore highly flexible and is well suited to a wide range of surface science applications.
In combination with the EBE-M Power Supply, which can run every pocket individually or in any combination with any of the other pockets, EBE-4 allows an optimal evaporation and coevaporation process by controlling filament current, and regulating emission and flux current.
SPECIFICATIONS
| Number of Pockets | 4 |
| Water Cooling | internal |
| Max. Power | 300 W |
| Operating Pressure | < 10-10 - 10-5 mbar |
| Optional Accessories | Crucible or rod Linear motion holder Fixed holder |
| Mounting Flange | NW35CF (2.75 ") |
| Insertion Depth | 210 mm |
| Max. Rod Diameter | 34 mm |
| Max. Rod Feed | Up to 25 mm |
| Max. Crucible Size | 0.07 cc |
| Power Supply | EBE-M |
SPARE PARTS
Crucible EBE-4-C-C for electron beam evaporator EBE-4. Material: Pyrolytic Graphite. Volume: 0,07 cc
Crucible EBE-4-C-Mo for electron beam evaporator EBE-4. Material: Molybdenum. Volume: 0,07 cc
Crucible EBE-4-C-Ta for electron beam evaporator EBE-4. Material: Tantalum. Volume: 0,07 cc
Crucible EBE-4-C-VC for electron beam evaporator EBE-4. Material: Vitreous Carbon. Volume: 0,07 cc
Crucible EBE-4-C-W for electron beam evaporator EBE-4. Material: Tungsten. Volume: 0,07 cc
Crucible Insert EBE-4-CI-Al2O3 Aluminum oxide for electron beam evaporator EBE-4
Crucible Insert EBE-4-CI-BN Bornitrit for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-C pyrolytic Carbon for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-Mo Molybdenum for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-Ta Tantalum for electron beam evaporator EBE-4
Crucible with end cap EBE-4-EC-W Tungsten for electron beam evaporator EBE-4
Crucible with welded end cap EBE-4-EC-Mo Molybdenum for electron beam evaporator EBE-4
Crucible with welded end cap EBE-4-EC-Ta Tantalum for electron beam evaporator EBE-4
Crucible with welded end cap EBE-4-EC-W Tungsten for electron beam evaporator EBE-4
End cap EBE-4 C-BN Bornitrit
End cap EBE-4 C-Ta Tantalum
Rodholder EBE-4-RH3 for electron beam evaporator EBE-4 for 3 mm rods including screws
End cap EBE-4 EC-W Tungsten
Replacement filament for EBE-4
Filament isolator ceramics Al2O3 for EBE-4
End cap EBE-4 C-Mo Molybdenum
Rodholder EBE-4-RH2 for electron beam evaporator EBE-4 for 2 mm rods including screws
Rodholder EBE-4-RH4 for electron beam evaporator EBE-4 for 4 mm rods including screws
