Differential Pumping Package for UVLS/UVS 300
Pumping System for SPECS UVS 300 and UVLS Light Sources
Efficient pumping system for the SPECS UVS 300 and UVLS for operation in low 10-8 mbar region. A turbo molecular pump with 67 l/s is attached to the UV souorce and connected to a rough pump system. Compatible with all versions of the UVS 300 and UVLS.