Differential Pumping Package for UVLS/UVS 300

Pumping System for SPECS UVS 300 and UVLS Light Sources

Efficient pumping system for the SPECS UVS 300 and UVLS for operation in low 10-8 mbar region. A turbo molecular pump with 67 l/s is attached to the UV souorce and connected to a rough pump system. Compatible with all versions of the UVS 300 and UVLS.

KEY FEATURES

  • Efficient Pumping System
  • One Turbo Molecular Pump
  • One Rough Vacuum Pump
  • Including all Necessary Vacuum Parts
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MADE FOR THESE METHODS

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