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SEM/SAM Systems

Auger Electron Spectrosopy is still widely used as an alternative to XPS for surface chemical analysis. Because of the by 2 to 3 orders of magnitude smaller small spot sizes, that electron sources can reach in comparison to X-ray sources, the analysis area is much smaller. Even so small, that an SEM image can be recorded and correlated to the elemental distribution. Often a combination with XPS and UPS makes sense to obtain additonal information on surface potentials and the electronic structure.