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PCS/MPS-ECR

The SPECS Mini ECR plasma source is a truly UHV compatible source. Fully bakeable, with an all-welded stainless steel vacuum envelope, and outstanding cooling from a full length water-jacket, it is suitable for use in vacuum levels ranging from HV to those found in the most demanding MBE applications. Through the action of the well-known electron cyclotron resonance (ECR) phenomenon, a high density plasma is created by coupling a radially symmetric GHz microwave field to ions on the surface of a multi-polar magnetic array. A unique combination of features and options and the compact size make this an extraordinarily versatile plasma source mounted on a DN40CF flange.

The SPECS Plasma Cracker Source PCS-ECR is a truly UHV compatible source for most demanding MBE applications. Through the action of the well-known electron cyclotron resonance (ECR) phenomenon, a high density plasma is created by coupling a radially symmetric microwave field to ions on the surface of a multi-polar magnetic array. The absence of a hot filament permits operation with most gases including reactive gases such as oxygen, chlorine, nitrogen and hydrogen.

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