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Multimethod Systems

The integration of analysis modules, preparation chambers and/or deposition satellites into a multimethod system enables repeated cycles of different analysis and preparation steps. Such in-situ studies are successfully used for example in materials development for devices in the field of semiconductor heterostructures, solar cells or energy storage devices. Air contact and thus material degradation can widely avoided by transferring the samples through vacuum in between the different steps of preparation and analysis.

Multimethod System